1, the advantages Turbo molecular pump due to certain aspects, than the cryogenic pump, ion pump and diffusion pump performance is superior. Therefore, under normal circumstances, more use of turbopumps. Its advantages are: In many applications, turbopumps may not require high vacuum valves or rough vacuum valves. Just press the button, the pump will be able to start working. From atmospheric pressure can be reduced to the ultimate pressure. The system can be coarse-tuned by turbomolecular pumps and can be accelerated up to operating speed. This eliminates the need for valves, pipes, traps, valve controls and other vacuum components. At the same time also eliminates the problems caused by these components. As a result, the turbomolecular pump system takes up little space and the turbomolecular pump can be installed in any direction without restriction (except for oil-lubricated pumps, which can only operate within a vertical ± 5 ° range). This feature can be used where installation is limited. (3) Gas delivery capability Most turbomolecular pumps are very capable of delivering light gases such as hydrogen and helium. So it is very suitable for ultra high vacuum process operation. For those hydrogen-rich processes, helium mass spectrometer leak detectors and other applications are available. Turbomolecular pumps are specifically designed to remove corrosive gases and are suitable for etching, reactive ion etching, ion beam processing, low pressure chemical vapor deposition, epitaxy and ion implantation processes. During these processes, the evacuated gas can have a corrosive effect on cryogenic pumps, ion pumps, diffusion pump fluids, and the like. Even the standard unprotected turbopump can be destroyed. As the turbo molecular pump is a transmission type pump, was pumping gas can pass through, not stored in the pump. It is therefore suitable for gas-loaded processes. Such as sputtering, etching and so on. (4) Suitable for ultra-high vacuum applications A sealed and degassed turbomolecular pump, coupled with a good performance of double-stage rotary vane pump (or the same performance of dry-type pump), the ultimate vacuum can generally reach 10-9 ~ 10-10Torr (ie, 133.3 ~ 13.33 nPa). If a turbomolecular pump and then string a turbomolecular pump, sealed and well-degassing metal pump, the general limit pressure of 1 × 10-10 ~ 1 × 10-11Torr (ie 13.33 ~ 1.333nPa) between. And unlike cryogenic pumps or ion pumps, turbomolecular pumps operate at full pumping speed under ultra-high vacuum conditions. Together with its cleanliness (no hydrocarbons detected), these properties clearly require the user to choose a turbomolecular pump for use on high-resolution mass spectrometers, molecular beam epitaxy equipment and ultra-high vacuum analytical instruments. (5) Good performance under high pressure Some Turbomolecular pump inlet pressure can be 10-1 ~ 10-3Torr (ie 13.33Pa ~ 133.3mPa) between the run. In this pressure range, the ion pump can not be applied, for the cryogenic pump need to throttle pumping speed or regular regeneration, the work of the diffusion pump will become unstable. (6) cycle time is short Most turbo molecular pumps, especially smaller, to reach the normal operating speed of time, generally require 1 ~ 3min. Different for different breeds and models of pumps. And can shut down immediately, and can expose the atmosphere. This fast cycle feature is useful in sample input systems, especially for handheld helium leak detectors. (7) Normal use of a long time In some applications, turbopumps are typically used more often than other pumps. Because of the heavy gas load and valve leakage, will cause the cryogenic pump often irregular timing regeneration or ion pump often repair, and turbo-molecular pump can also be used to eliminate the pump oil contamination of the vacuum chamber. Any vacuum pump has shortcomings, turbo molecular pump is no exception. Here are some of its shortcomings. (1) high equipment costs In the pumping speed greater than 1000L / s turbo molecular pump than the diffusion pump and cryogenic pump equipment investment. However turbo-molecular pumps are good for special applications where diffusion pumps and cryogenic pumps can not be used due to process gas or other reasons. Small turbopumps are expensive compared to small or medium-size diffusion pumps. However, taking into account the diffusion pump system requires valves, baffles, traps, valve controllers and piping, the total cost to calculate, the difference between the two is not big, in some cases, turbo molecular pump is a cheaper option . (2) Sensitive to particles or sediments If an object (screw, shards of glass, filament or silicon) falls into a functioning turbomolecular pump, the turbine will be damaged and often will have to be returned to the manufacturer for repair. Once an accident damage is serious, there will not be a few pieces of reuse. Rebuilt, replacement parts is very expensive. In order to work safety, installed in the pump inlet fine pore filter to protect the normal operation of the pump. This measure of pump pumping speed greater loss. Deposited on the blade thick deposits, will cause the blade wear and channel blockage, will also affect the rotor imbalance. If some particles enter the bearing, causing wear and tear, can reduce the working life of the pump. Therefore, in some applications, it is necessary to install protective measures. (3) noise and vibration From the experience of use, the pump will appear vibration and noise problems, mostly bearing damage and poor balance problems. In normal operation, the pump is in a calm state with a maximum amplitude of between 0.1 and 0.001 μm (ie 100 and 1 nm) and is used on some precision equipment. The measured vibration can not be measured as shown in Figure 5. Turbomolecular pump (Balzers 330 model turbo molecular pump) spectrum analysis. The unit of vibration velocity V is μm / s and the unit of frequency is Hz. The formula for calculating the amplitude is: d = V / 2πf, where d is the amplitude μm, f is the frequency Hz and the maximum amplitude is less than 0.005μm (<5nm) With such a small vibration, the turbo-molecular pump runs smoothly with low noise and is a problem for some special applications. Some users are afraid to use the turbo molecular pump because of fear of broken rotor blades. When the pump is in normal operation, the impeller suddenly suffers foreign material inhalation or the bearing is worn and broken. Often protective measures, such as adding filter at the entrance, is usually avoidable. (5) Exposure to the atmosphere can cause accidents Any high vacuum pump will run into this kind of accident during operation. Such as regulation rupture, the entrance of the pipeline, valves, sealing problems, may suddenly make the vacuum pump inlet exposed to atmospheric pressure. Different types of turbo molecular pump, the ability to withstand atmospheric pressure impact is different. Some pumps are damaged by the blade's resonant bending, but some pumps are subject to atmospheric impact without damage. The best way is to get the result of the test by the manufacturer. Diffusion pumps and cryogenic pumps at work encountered such a sudden accident is too much trouble than the turbo molecular pump resistance is poor, such as diffusion pump oil is oxidized will quickly contaminate the vacuum chamber, cryogenic pumps require regeneration and so on. Turbomolecular pump to have a longer working life and the best running performance, the user must follow the operating procedures and the use of steps, which will be discussed in detail below. This article Keyword search: more pump valve seals Supply Glitter Gold Thermosetting Powder Coating China Glitter Gold Thermosetting Powder Coating,Gold Glitz Powder Coat manufacturer, choose the high quality Bright Gold Powder Coat,Resin Glitter Powder, etc. Glitter Gold Thermosetting Powder Coating,Gold Glitz Powder Coat,Bright Gold Powder Coat,Resin Glitter Powder Longkou Guomei Decoration Material Co.,Ltd. , https://www.lkgmcoating.com
(1) Clean, Oil-Free Steam Backflow Turbomolecular pumps work well without any trap and operating procedures to provide a very clean vacuum for the drawn vessel without any hydrocarbons. Because of the modern turbopumps in addition to the big pump outside the oil lubrication, oil lubrication for small pumps, but also useful air bearings, but more with magnetic bearings. In recent years, there have been many dry-type pump appeared, the turbo molecular pump system does not exist oil vapor reflux, making it truly a clean dry high vacuum pump (2) easy to use
2, shortcomings
(4) broken problem